@article{oai:uec.repo.nii.ac.jp:00007471,
 author = {宇佐美, 興一 and 三枝, 隆 and 山中, 惣之助 and Usami, Koichi and Saegusa, Takashi and Yamanaka, Sonosuke},
 issue = {1},
 journal = {電気通信大学学報, Reports of the University of Electro-Communications},
 month = {Aug},
 pages = {23--31},
 title = {二重陰極スパッタリングによるSi薄膜},
 volume = {27},
 year = {1976},
 yomi = {ウサミ, コウイチ and サエグサ, タカシ and ヤマナカ, ソウノスケ}
}