@article{oai:uec.repo.nii.ac.jp:00007227, author = {後藤, 俊成 and 佐藤, 満男 and 山中, 惣之助 and Goto, Toshinari and Sato, Mitsuo and Yamanaka, Sonosuke}, issue = {24}, journal = {電気通信大学学報, Reports of the University of Electro-Communications}, month = {Aug}, pages = {23--27}, title = {カソードスパッタリングにおける端部効果}, year = {1968}, yomi = {ゴトウ, トシナリ and サトウ, ミツオ and ヤマナカ, ソウノスケ} }