@phdthesis{oai:uec.repo.nii.ac.jp:00010046,
 author = {髙橋, 学士 and Takahashi, Satoshi},
 month = {2021-09-13},
 note = {2021},
 school = {電気通信大学},
 title = {Xe多価イオンによるH終端Si表面とH2O吸着Si表面のH+スパッタリング},
 year = {},
 yomi = {タカハシ, サトシ}
}