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Siのプラズマ酸化膜を用いたMIS型トンネルエミッタの作製
https://uec.repo.nii.ac.jp/records/8311
https://uec.repo.nii.ac.jp/records/8311daf57715-d48f-4f04-9927-ee38943de250
Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
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公開日 | 1999-12-01 | |||||
タイトル | ||||||
タイトル | Siのプラズマ酸化膜を用いたMIS型トンネルエミッタの作製 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Fabrication of MIS Type Tunnel Emitter Using Thin Si Oxide film by Plasma Oxidation | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
著者 |
宇佐美, 興一
× 宇佐美, 興一× 三宅, 英太郎× 守屋, 雅隆× 小林, 忠行× 後藤, 俊成× Usami, Kouichi× Miyake, Eitaro× Moriya, Masataka× Kobayashi, Tadayuki× Goto, Toshinari |
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書誌情報 |
電気通信大学紀要 en : Bulletin of the University of Electro-Communications 巻 12, 号 2, p. 135-139, 発行日 1999-12 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 09150935 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN10016842 |