WEKO3
アイテム
{"_buckets": {"deposit": "c6670400-a700-43b6-a398-e98c248ed33d"}, "_deposit": {"created_by": 3, "id": "7471", "owners": [3], "pid": {"revision_id": 0, "type": "depid", "value": "7471"}, "status": "published"}, "_oai": {"id": "oai:uec.repo.nii.ac.jp:00007471", "sets": ["125"]}, "author_link": ["19069", "19072", "19068", "19070", "19071", "19073"], "item_10002_biblio_info_7": {"attribute_name": "書誌情報", "attribute_value_mlt": [{"bibliographicIssueDates": {"bibliographicIssueDate": "1976-08-31", "bibliographicIssueDateType": "Issued"}, "bibliographicIssueNumber": "1", "bibliographicPageEnd": "31", "bibliographicPageStart": "23", "bibliographicVolumeNumber": "27", "bibliographic_titles": [{"bibliographic_title": "電気通信大学学報"}, {"bibliographic_title": "Reports of the University of Electro-Communications", "bibliographic_titleLang": "en"}]}]}, "item_10002_source_id_11": {"attribute_name": "書誌レコードID", "attribute_value_mlt": [{"subitem_source_identifier": "AN00152480", "subitem_source_identifier_type": "NCID"}]}, "item_10002_source_id_9": {"attribute_name": "ISSN", "attribute_value_mlt": [{"subitem_source_identifier": "04934253", "subitem_source_identifier_type": "ISSN"}]}, "item_access_right": {"attribute_name": "アクセス権", "attribute_value_mlt": [{"subitem_access_right": "metadata only access", "subitem_access_right_uri": "http://purl.org/coar/access_right/c_14cb"}]}, "item_creator": {"attribute_name": "著者", "attribute_type": "creator", "attribute_value_mlt": [{"creatorNames": [{"creatorName": "宇佐美, 興一"}, {"creatorName": "ウサミ, コウイチ", "creatorNameLang": "ja-Kana"}], "nameIdentifiers": [{"nameIdentifier": "19068", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "三枝, 隆"}, {"creatorName": "サエグサ, タカシ", "creatorNameLang": "ja-Kana"}], "nameIdentifiers": [{"nameIdentifier": "19069", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "山中, 惣之助"}, {"creatorName": "ヤマナカ, ソウノスケ", "creatorNameLang": "ja-Kana"}], "nameIdentifiers": [{"nameIdentifier": "19070", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Usami, Koichi", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "19071", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Saegusa, Takashi", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "19072", "nameIdentifierScheme": "WEKO"}]}, {"creatorNames": [{"creatorName": "Yamanaka, Sonosuke", "creatorNameLang": "en"}], "nameIdentifiers": [{"nameIdentifier": "19073", "nameIdentifierScheme": "WEKO"}]}]}, "item_language": {"attribute_name": "言語", "attribute_value_mlt": [{"subitem_language": "jpn"}]}, "item_resource_type": {"attribute_name": "資源タイプ", "attribute_value_mlt": [{"resourcetype": "departmental bulletin paper", "resourceuri": "http://purl.org/coar/resource_type/c_6501"}]}, "item_title": "二重陰極スパッタリングによるSi薄膜", "item_titles": {"attribute_name": "タイトル", "attribute_value_mlt": [{"subitem_title": "二重陰極スパッタリングによるSi薄膜"}, {"subitem_title": "The Investigation of Si Thin Films Deposited by The Double Cathode Sputtering System", "subitem_title_language": "en"}]}, "item_type_id": "10002", "owner": "3", "path": ["125"], "permalink_uri": "https://uec.repo.nii.ac.jp/records/7471", "pubdate": {"attribute_name": "公開日", "attribute_value": "1976-08-31"}, "publish_date": "1976-08-31", "publish_status": "0", "recid": "7471", "relation": {}, "relation_version_is_last": true, "title": ["二重陰極スパッタリングによるSi薄膜"], "weko_shared_id": -1}
二重陰極スパッタリングによるSi薄膜
https://uec.repo.nii.ac.jp/records/7471
https://uec.repo.nii.ac.jp/records/74717a4d118c-512d-424e-8563-0d371e7f6230
Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
---|---|---|---|---|---|---|
公開日 | 1976-08-31 | |||||
タイトル | ||||||
タイトル | 二重陰極スパッタリングによるSi薄膜 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | The Investigation of Si Thin Films Deposited by The Double Cathode Sputtering System | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
著者 |
宇佐美, 興一
× 宇佐美, 興一× 三枝, 隆× 山中, 惣之助× Usami, Koichi× Saegusa, Takashi× Yamanaka, Sonosuke |
|||||
書誌情報 |
電気通信大学学報 en : Reports of the University of Electro-Communications 巻 27, 号 1, p. 23-31, 発行日 1976-08-31 |
|||||
ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 04934253 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00152480 |