WEKO3
アイテム
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カソードスパッタリングにおける端部効果
https://uec.repo.nii.ac.jp/records/7227
https://uec.repo.nii.ac.jp/records/7227265ec501-dcfe-4aaa-874d-66181ee4eb7c
Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
---|---|---|---|---|---|---|
公開日 | 1968-08-10 | |||||
タイトル | ||||||
タイトル | カソードスパッタリングにおける端部効果 | |||||
タイトル | ||||||
言語 | en | |||||
タイトル | Edge Effect in Cathode Sputtering | |||||
言語 | ||||||
言語 | jpn | |||||
資源タイプ | ||||||
資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
資源タイプ | departmental bulletin paper | |||||
アクセス権 | ||||||
アクセス権 | metadata only access | |||||
アクセス権URI | http://purl.org/coar/access_right/c_14cb | |||||
著者 |
後藤, 俊成
× 後藤, 俊成× 佐藤, 満男× 山中, 惣之助× Goto, Toshinari× Sato, Mitsuo× Yamanaka, Sonosuke |
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書誌情報 |
電気通信大学学報 en : Reports of the University of Electro-Communications 号 24, p. 23-27, 発行日 1968-08-10 |
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ISSN | ||||||
収録物識別子タイプ | ISSN | |||||
収録物識別子 | 04934253 | |||||
書誌レコードID | ||||||
収録物識別子タイプ | NCID | |||||
収録物識別子 | AN00152480 |